TSMC Work on 5nm Process Leaves EUV Undecided

Alan Patterson, EETimes
12/15/2015 00:00 AM EST

TAIPEI — Taiwan Semiconductor Manufacturing Co. (TSMC), the world’s largest foundry, said it has started work on a 5nm process to push ahead its most advanced technology, yet the company remains undecided on the adoption of extreme ultraviolet lithography at that node.

TSMC Co-CEO Mark Liu made the comments about the company’s 5nm work at a supply chain management conference in Hsinchu, Taiwan earlier this month. The company, which hasn’t yet put 5nm on its product roadmap, is still evaluating whether to use extreme ultraviolet (EUV) lithography as part of the process.

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