TSMC starts FinFETs in 2013, tries EUV at 10 nm
Rick Merritt, EETimes
4/11/2013 8:18 AM EDT
Company executives detailed the new processes and how they aim to get there at an annual symposium here. They also provided an update on their work on 3-D chip stacks and their ongoing ramp of today’s 28-nm process node.
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