PZT 3-axis MEMS gyro interface

STAR2010 is an ASIC in a 1.8V/3.3V, 0.18µm CMOS process which is integrated with a 3-axis MEMS gyroscope. A PZT based MEMS gyroscope is used to minimize the required Q-factor of the packaged device, as well as minimize actuation voltages. As a result this ASIC does not require high voltage devices or potentially yield affecting voltage boosting techniques to actuate the MEMS. The ASIC uses an advanced DSP engine to minimize temperature fluctuations in gain and zero-rate-output variation in each readout path. Factory calibrated data is stored in an OTP memory which can be automatically loaded into the ASIC at start-up using a built-in state machine.

Two interrupts are available (INT, DRDY). INT can be configured to detect various states of the data FIFO. DRDY can flag the data exceeding a programmable threshold. Alternatively DRDY can also be set as an input and induce the data FIFO to toggle operating modes depending on the value of DRDY. Digital outputs are accessed via an I2C interface, where the full scale rotational rate of the output can be programmed to be either 250, 500, 1000, or 2000°/s. A 5x optional zoom factor is also available which digitally zooms the full-scale resolution by 5x. Thus a full-scale as low as 50°/s is available. The output data rate can be programmed to be either: 100, 200, 400, or 800S/s.

The IP core area is 3mm x 2mm, and consumes a total of 6.2mA of current nominally. An optional low-power mode is also available which trades a moderate reduction of sensitivity for lower current consumption (3.9mA). The ASIC is designed to operated between -40°C and +85°C.