The Why and How of Fine-Grain 3D Integration
January 23, 2012
As many of you know, 3D technologies in the marketplace today have huge TSVs. For example, TSMC's 28nm technology has 6um diameter TSVs with 5um keep-out zone. Other manufacturers are offering similar TSV sizes too. When you start comparing these with on-chip feature sizes (28nm), you'll understand why I use the term "huge" to describe these TSVs. In contrast, fine-grain 3D technologies are defined as those having TSV pitches smaller than 500nm.
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