CEA-Leti Demonstrates Embedded FeRAM Platform Compatible with 22nm FD-SOI Node

​​Scalable Platform ‘Opens the Door for Faster, More Energy-Efficient, and Cost-Effective Memory Solutions in Embedded Systems, Such as IoT, Mobile Devices, and Edge Computing’​

SAN FRANCISCO – Dec. 10, 2024 – CEA-Leti research engineers have demonstrated for the first time a scalable hafnia-zirconia-based ferroelectric capacitor platform integrated into the back-end-of-line (BEOL) at the 22nm FD-SOI technology node. This breakthrough, reported today at the IEDM 2024 conference, represents a major advance in ferroelectric memory technology, significantly advancing scalability for embedded applications and positioning ferroelectric RAM (FeRAM) as a competitive memory solution for advanced nodes.

Current embedded FeRAM products use perovskite materials, like PZT, which are not CMOS compatible and cannot scale beyond the 130nm node technology. The discovery of ferroelectricity in HfO₂-based thin films, which are CMOS compatible and scalable, opens new possibilities for embedded FeRAM, but previous R&D developments were reported at the 130nm node. By pushing Hf_0.5Zr_0.5O₂ (HZO) FeRAM technology to the 22nm FD-SOI node, this demonstration opens the door for faster, more energy-efficient, and cost-effective memory solutions in embedded systems such as IoT, mobile devices, and edge computing.

The results were presented today in the IEDM paper, “Hf_0.5Zr_0.5O₂ FeRAM Scalability Demonstration at 22nm FD-SOI Node for Embedded Applications".

“FD-SOI technology is well-known for its low-power capability and makes it a very good fit with FeRAM, which is intrinsically the most energy efficient memory technology at bitcell level," explained Simon Martin and Laurent Grenouillet, two main contributors to the paper. “Scaling down to 22nm required fabricating functional 2D ferroelectric capacitors down to 0.0028µm², as well as 3D ferroelectric capacitors, while keeping a relatively low thermal budget for HZO film crystallization."​​

About CEA-Leti (France)​

CEA-Leti, a technology research institute at CEA, is a global leader in miniaturization technologies enabling smart, energy-efficient and secure solutions for industry. Founded in 1967, CEA-Leti pioneers micro-& nanotechnologies, tailoring differentiating applicative solutions for global companies, SMEs and startups. CEA-Leti tackles critical challenges in healthcare, energy and digital migration. From sensors to data processing and computing solutions, CEA-Leti's multidisciplinary teams deliver solid expertise, leveraging world-class pre-industrialization facilities. With a staff of more than 2,000 talents, a portfolio of 3,200 patents, 11,000 sq. meters of cleanroom space and a clear IP policy, the institute is based in Grenoble, France, and has offices in Silicon Valley, Brussels and Tokyo. CEA-Leti has launched 76 startups and is a member of the Carnot Institutes network. Follow us on www.leti-cea.com and @CEA_Leti.

Technological expertise

CEA has a key role in transferring scientific knowledge and innovation from research to industry. This high-level technological research is carried out in particular in electronic and integrated systems, from microscale to nanoscale. It has a wide range of industrial applications in the fields of transport, health, safety and telecommunications, contributing to the creation of high-quality and competitive products.

For more information: www.cea.fr/english ​